Pre-oxidization of deformable elements of microstructures
US7514012B2 · kind B2 · utility
0Cited by
25References
117Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 27, 2004 |
| Grant date | Apr 7, 2009 |
| Priority date | — |
| Expiry date | Feb 12, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/042
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The present invention discloses a method for processing a deformable element of a microstructure for reducing the plastic deformation by oxidizing the deformable element. The method of the present invention can be performed at a variety of stages of the fabrication and packaging processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.