Method of producing porous silicon particles by stain-etching and silicon nanoparticles from stain-etched silicon powder
US7514369B2 · kind B2 · utility
94Cited by
16References
18Claims
0Family size
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Key dates
| Filing date | Jun 14, 2007 |
| Grant date | Apr 7, 2009 |
| Priority date | — |
| Expiry date | Jun 14, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/2993
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
The present invention is for a porous silicon powder comprising silicon particles wherein the outermost layers of said particles are porous. The present invention is also directed to a method of making this porous silicon powder using a stain etch method. The present invention is also directed to a method of making silicon nanoparticles from the porous silicon powders using a process of ultrasonic agitation. The present invention also includes methods of processing these silicon nanoparticles for use in a variety of applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.