Piezoelectric element, liquid-jet head using piezoelectric element and liquid-jet apparatus
US7514854B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 29, 2006 |
| Grant date | Apr 7, 2009 |
| Priority date | — |
| Expiry date | Aug 17, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2202/03
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
Disclosed are a piezoelectric element in which crystallinity of a piezoelectric layer is improved, and which has uniform characteristics of the piezoelectric layer, a liquid-jet head using the piezoelectric element as well as a liquid-jet apparatus. The piezoelectric element includes: a lower electrode provided to one surface side of a substrate; a piezoelectric layer which is made of a piezoelectric material containing lead (Pb), zirconium (Zr) and titanium (Ti), and which is provided above the lower electrode; and an upper electrode provided above the piezoelectric layer, and in the piezoelectric element, a relative permittivity of the piezoelectric layer is 750 to 1500 and a coercive electric field of the piezoelectric layer is 10 to 40 kV/cm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.