Patent · US Active

Optical device

US7515325B2 · kind B2 · utility

6Cited by
5References
23Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJan 18, 2007
Grant dateApr 7, 2009
Priority date
Expiry dateFeb 15, 2027

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B26/001
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

An optical device includes a movable portion and a fixed portion having a first light reflection portion. The movable portion has a second light reflection portion facing the first light reflection portion with a first gap. The first and second light reflection portions are configured to reflect light repeatedly between the first and second light reflection portions so as to cause interference and emit light having a wavelength corresponding to a size of the first gap. The optical device also includes a first electrode portion fixed to the fixed portion so as to face a surface of the movable portion near the first light reflection portion with a second gap between the movable portion and the first electrode portion. The optical device has a second electrode portion fixed to the fixed portion so as to face another surface of the movable portion with a third gap between the movable portion and the second electrode portion. One of the first and second electrode portions serves as a detection electrode for detecting a capacitance between the movable portion and the detection electrode. Another of the first and second electrode portions serves as a drive electrode. The optical device in…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.