Patent · US Active

Replacement apparatus for an optical element

US7515363B2 · kind B2 · utility

0Cited by

115References

23Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Jens Kugler · Heubach, DE
Franz Sorg · Aalen, DE
Andreas Wurmbrand · Aalen, DE
Thomas Schletterer · Oberkochen, DE
Thomas Ittner · Aalen, DE

Key dates

Filing date	Aug 28, 2007
Grant date	Apr 7, 2009
Priority date	—
Expiry date	Aug 28, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70825
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.