Combining automated and manual information in a centralized system for semiconductor process control
US7515982B2 · kind B2 · utility
4Cited by
10References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 30, 2006 |
| Grant date | Apr 7, 2009 |
| Priority date | — |
| Expiry date | Mar 22, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
In one embodiment, the present invention includes a method for receiving entries in a database, each corresponding to a semiconductor lot to be processed, automatically assigning each of the entries to a process tool, and dynamically dispatching the semiconductor lot corresponding to an assigned entry to the corresponding assigned process tool based on status information of the assigned process tool. Other embodiments are described and claimed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.