Sensor chip and apparatus for tactile and/or flow sensing
US7516671B2 · kind B2 · utility
9Cited by
10References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 22, 2007 |
| Grant date | Apr 14, 2009 |
| Priority date | — |
| Expiry date | Feb 22, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49103
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor chip, comprising a flexible, polymer-based substrate, and at least one microfabricated sensor disposed on the substrate and including a conductive element. The at least one sensor comprises at least one of a tactile sensor and a flow sensor. Other embodiments of the present invention include sensors and/or multi-modal sensor nodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.