High purity carbonaceous material and ceramic coated high purity carbonaceous material
US7517516B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 6, 2004 |
| Grant date | Apr 14, 2009 |
| Priority date | — |
| Expiry date | Jul 6, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31504
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
The invention provides a high purity carbonaceous material which is reduced in contents of oxygen, nitrogen and chlorine readily binding to carbon atoms and in contents of elements, phosphorus, sulfur and boron, readily binding to carbon atoms upon heating and which can be used in producing single crystals such as semiconductors, a high purity carbonaceous material for use as a substrate for ceramic layer coating, and a ceramic layer-coated high purity carbonaceous material. The high purity carbonaceous material has oxygen content of 1×1018 atoms/cm3 or less as determined by SIMS. Its chlorine content is preferably 1×1016 atoms/cm3 or less as determined by SIMS, and its nitrogen content is preferably 5×1018 atoms/cm3 or less as determined by SIMS. Its phosphorus, sulfur and boron contents are preferably not higher than respective specified values. Such a high purity carbonaceous material is coated with ceramic layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.