Use of optical fourier transform for dimensional control in microelectronics
US7518739B2 · kind B2 · utility
0Cited by
7References
48Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 17, 2004 |
| Grant date | Apr 14, 2009 |
| Priority date | — |
| Expiry date | Nov 29, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/95623
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for measuring the dimensional or structural characteristics of an object. A detector forms an optical Fourier transform image of an elemental surface of the object in an image focal plane. A processor produces data relating to at least one dimensional and/or structural characteristic of the object from the information provided by the detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.