Laser annealing apparatus
US7519252B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 26, 2007 |
| Grant date | Apr 14, 2009 |
| Priority date | — |
| Expiry date | Mar 26, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/005
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A laser annealing apparatus comprises a laser oscillator having a Q switching action, one or a plurality of partially reflective mirrors for split a laser beam emitted from the laser oscillator into a plurality of laser beams, a plurality of optical fibers which respectively transmit the plurality of laser beams split by the partially reflective mirrors, and whose respective emission ends are arranged linearly in one direction, a first optical system for synthesizing and homogenizing the plurality of laser beams emitted from the optical fibers, and a second optical system for focusing the laser beam emitted from the first optical system on the work piece surface as a rectangular laser beam whose beam shape is long in the lateral direction and short in the longitudinal direction. As a result, laser power transmission by means of slender optical fibers is possible even in cases in which a green laser such as the second harmonic of an Nd:YAG laser having a Q switching action or the like is used as a heating light source. Accordingly, a compact laser annealing apparatus that has a high-quality working performance and does not require a laser amplifier or high-frequency generating appar…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.