Nanoprint equipment and method of making fine structure
US7520742B2 · kind B2 · utility
22Cited by
9References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 17, 2004 |
| Grant date | Apr 21, 2009 |
| Priority date | — |
| Expiry date | Jan 31, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/887
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A pillar with a high aspect ratio is transferred by a nanoprinting method. In order to form a fine structure on a substrate, a nanoprinting apparatus heats and presses the substrate and a mold with a fine concave-convex pattern formed thereon, the mold having a mechanism for transferring and applying a mold-releasing agent. A method for transferring a fine structure using the aforementioned nanoprinting apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.