Method of fabricating micro actuator having media stage
US7520998B2 · kind B2 · utility
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13Claims
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Key dates
| Filing date | Nov 13, 2006 |
| Grant date | Apr 21, 2009 |
| Priority date | — |
| Expiry date | Nov 20, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K2201/18
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method of fabricating a micro actuator is provided including a media stage having a media loading surface and a coil for driving the media stage, formed on the opposite surface of the media stage to the media loading surface. The method includes forming a groove on a first surface of a first substrate, forming a coil on a first surface of a second substrate, bonding the first surface of the first substrate to the first surface of the second substrate, and forming the media loading surface on a second surface of the second substrate, which is opposite the first surface of the second substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.