Multiple beam micro-machining system and method
US7521651B2 · kind B2 · utility
14Cited by
75References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 12, 2003 |
| Grant date | Apr 21, 2009 |
| Priority date | — |
| Expiry date | Nov 19, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K2103/172
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.