Electrically driven microfluidic pumping for actuation

US7523608B2 · kind B2 · utility

Assignee

• University of Maryland · US

Inventors

• Benjamin Shapiro · Washington, US
• Elisabeth Smela · Silver Spring, US

Key dates

• Filing date: Sep 9, 2005
• Grant date: Apr 28, 2009
• Expiry date: Jun 25, 2026

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F04B43/04
• WIPO field: Engines, pumps, turbines
• WIPO sector: Mechanical engineering

Abstract

An actuator cell includes a supply chamber containing fluid, and an expansion chamber for receiving fluid from the supply chamber, and being expandable to deform a predetermined area of the actuator cell. The actuator cell further includes a channel providing a fluid flow passage between the supply and expansion chambers, and a compliant material substantially surrounding the supply chamber, the expansion chamber and/or the channel. An electric circuit applies an electric field adjacent the supply and expansion chambers, and thereby causes fluid flow from the supply to the expansion chamber.