Micromechanical rotation rate sensor having error suppression

US7523663B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Rainer Willig · Tamm, DE
• Buckhard Kuhlmann · Eningen unter Achalm, DE
• Udo-Martin Gomez · Leonberg, DE
• Wolfram Bauer · Lörrach, DE
• Johannes Classen · Reutlingen, DE
• Christoph Lang · Palo Alto, US
• Michael Veith · Reutlingen, DE

Key dates

• Filing date: Dec 22, 2005
• Grant date: Apr 28, 2009
• Expiry date: Jun 15, 2026

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5726
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical rotation rate sensor has a seismic mass and driving devices which cause a driving vibration of the seismic mass in a first direction x. The rotation rate sensor has measuring devices which measure a deflection of the seismic mass in a second direction y, and generate a deflection signal. The deflection includes a measurement deflection caused by a Coriolis force and an interference deflection, the interference deflection being phase-shifted with respect to the measurement deflection by 90°. Compensation devices are provided at the seismic mass to reduce the interference deflection. Regulation devices are provided, to which the deflection signal is supplied as an input variable, which demodulate an interference deflection signal from the deflection signal, and which generate a compensation signal from the interference deflection signal, which is supplied to the compensation devices.