Precision substrate storage container
US7523829B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 10, 2004 |
| Grant date | Apr 28, 2009 |
| Priority date | — |
| Expiry date | Apr 23, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67379
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The precision substrate storage container includes a bottom plate 20 removably attached to the bottom of a container body 1 in which a multiple number of semiconductor wafers are accommodated in alignment; a holder 50 removably supported on bottom plate 20; and a RFID system transponder 60 held in holder 50. Bottom plate 20 includes a base plate 21 opposing the rear bottom of container body 1 and a wall plate 30 erected on base plate 21. The base plate 21 is formed with a first supporting structure 40 for supporting holder 50 that is oriented in the horizontal direction and a second supporting structure 43 for supporting holder 50 that is oriented in the vertical direction so as to selectively change the position of holder 50 taking one of the two directions, longitudinal and transverse.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.