Method and apparatus for measuring the size of free air balls on a wire bonder
US7523848B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 9, 2005 |
| Grant date | Apr 28, 2009 |
| Priority date | — |
| Expiry date | Apr 19, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/14
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A system for measuring the size of free air balls for use with a wire bonder having a wire bonding tool and an Electric Flame Off (EFO) device is provided. The system includes an imager disposed above a first image plane, a prism disposed below the imager, and at least one lens positioned between the first image plane and the prism in a first optical path. The at least one lens is positioned between the prism and the imager in a second optical path, where the second optical path is different from the first optical path. An image of the free air ball disposed at a lower portion of the wire bonding tool is provided to the imager via the prism and the at least one lens.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.