Precursor compositions and methods for the deposition of passive electrical components on a substrate

US7524528B2 · kind B2 · utility

Assignee

• Cabot Corporation · US

Inventors

• Toivo T. Kodas · Albuquerque, US
• Mark J. Hampden-Smith · Albuquerque, US
• Karel Vanheusden · Albuquerque, US
• Hugh Denham · Albuquerque, US
• Aaron D. Stump · Albuquerque, US
• Allen B. Schult · Albuquerque, US
• Paolina Atanassova · Waltham, US
• Klaus Kunze · Albuquerque, US

Key dates

• Filing date: Oct 4, 2002
• Grant date: Apr 28, 2009
• Expiry date: Mar 5, 2024

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49099
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

Precursor compositions for the deposition of electronic features such as resistors and dielectric components and methods for the deposition of the precursor compositions. The precursor compositions have a low viscosity, such as not greater than about 1000 centipoise and can be deposited using a direct-write tool. The precursors also have a low conversion temperature, enabling the formation of electronic features on a wide variety of substrates, including low temperature substrates.