Optical device
US7525713B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 18, 2007 |
| Grant date | Apr 28, 2009 |
| Priority date | — |
| Expiry date | Feb 16, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/001
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical device includes a movable portion and a fixed portion having a first light reflection portion. The movable portion has a second light reflection portion facing the first light reflection portion with a first gap. The first and second light reflection portions are configured to reflect light repeatedly between the first and second light reflection portions so as to cause interference and emit light having a wavelength corresponding to a size of the first gap. The optical device includes a first drive electrode portion facing a surface of the movable portion near the first light reflection portion with a second gap between the movable portion and the first drive electrode portion. The optical device has a second drive electrode portion facing another surface of the movable portion with a third gap between the movable portion and the second drive electrode portion. The optical device also includes a circuit operable to generate a potential difference between the first and second drive electrode portions and the movable portion so as to generate an electrostatic attraction force therebetween for changing a position and/or a posture of the movable portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.