Micro-actuator having swing support to allow horizontal swinging movement of slider support
US7525769B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 26, 2004 |
| Grant date | Apr 28, 2009 |
| Priority date | — |
| Expiry date | Jul 4, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/5556
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A thin film piezoelectric (PZT) micro-actuator is disclosed. Two thin film pieces of PZT are couple to a slider support frame. The slider support frame has a slider support connected by a leading beam to a base. The two thin film pieces of PZT connect the slider support to the base. Applied voltage causes the thin film pieces of PZT to contract or expand, moving the slider support in relation to the base. The thin film pieces of PZT can be single or multiple layers. The thin film PZT micro-actuator can be coupled to the suspension by anisotropic conductive film, with the thin film pieces of PZT between the slider support frame and the suspension. Alternately, the thin film PZT micro-actuator can be coupled to the suspension with the thin film pieces of PZT exterior to the slider support frame and the suspension.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.