Sensor fabricating method
US7527821B2 · kind B2 · utility
1Cited by
16References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 2, 2001 |
| Grant date | May 5, 2009 |
| Priority date | — |
| Expiry date | May 10, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/126
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides methods for fabricating a sensor on a substrate having a pair of electrodes. The methods are especially amenable to broad variations amongst individual sensor on a single substrate. The intra-sensor variation within the array can be achieved in various fashions. The method provide intra-sensor variation using quantitative and qualitative differences in each sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.