Deflector mirror with regions of different flexural rigidity
US7529011B2 · kind B2 · utility
18Cited by
4References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 11, 2005 |
| Grant date | May 5, 2009 |
| Priority date | — |
| Expiry date | Apr 11, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A deflector mirror is disclosed that includes a mirror substrate configured to vibrate in a reciprocating manner on beams as a torsional rotary shaft so as to deflect a light beam emitted from a light source. The mirror substrate includes multiple regions in each of portions thereof extending from the torsional rotary shaft to respective ends of the mirror substrate, the regions being different in flexural rigidity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.