Optical element

US7529046B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Thomas Schletterer · Oberkochen, DE
• Franz Sorg · Aalen, DE

Key dates

• Filing date: Apr 13, 2005
• Grant date: May 5, 2009
• Expiry date: Jun 11, 2025

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70825
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

There is provided an optical element. The optical element includes an element body having an optically effective region that has an optical axis and a peripheral region extending in a circumferential direction of the element body, a holding region disposed in the peripheral region, and a contact region in the holding region. The holding region co-operates with a holding device to hold the element body. The contact region is configured with a first contact surface and a second contact surface that are (a) spaced apart from one another in a direction of the optical axis, (b) both inclined with respect to the optical axis; and (c) not parallel to one another.