Charge neutralizer for glass substrate
US7529074B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 31, 2006 |
| Grant date | May 5, 2009 |
| Priority date | — |
| Expiry date | May 11, 2027 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65G2249/02
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention provides a charge neutralizer for accurately irradiating a soft X ray into a narrow gap after a glass substrate is lifted up.A soft X ray is introduced into a gap “d” from a soft X ray charge neutralizer 14, and the soft X ray is detected by a soft X ray optical axis monitor 16. Mounting position adjusting means 15 is adjusted by a detection output from said soft X ray optical axis monitor, and optical axis alignment is performed. Next, according to information from a database 19, a control unit 17 controls gap adjusting means 13, and charge neutralization is performed. Charge neutralization can also be performed by controlling the gap “d” by the gap adjusting means 13 while judging neutralizing conditions as to whether a charged potential measured by an electrometer 18 is within an allowable value by the control unit 17 or not.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.