System and method for laminography inspection
US7529336B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 31, 2007 |
| Grant date | May 5, 2009 |
| Priority date | — |
| Expiry date | May 31, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/419
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A laminography inspection system comprises an irradiation source, a plurality of linear image detectors defining an image plane, a fixed table for placement of a test object in a stationary position between the irradiation source and the image detectors, and a computing device for processing a plurality of images of the test object acquired from the image detectors. The irradiation source and the image detectors perform a plurality of parallel linear scanning passes across the area of the test object to acquire images of the test object under different viewing angles. Based on the acquired image data, the computing device determines a warp compensation and generates a cross-sectional image of a selected section within the test object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.