High-Performance non-contact support platforms
US7530778B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 27, 2002 |
| Grant date | May 12, 2009 |
| Priority date | — |
| Expiry date | Sep 5, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67784
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A non-contact support platform for supporting without contact a stationary or traveling object by air-cushion induced forces, the platform comprising at least one of two substantially opposite support surfaces, each support surfaces comprising at least one of a plurality of basic cells each having at least one of a plurality of pressure outlets and at least one of a plurality of air-evacuation channels at least one of a plurality of outlets, and one of a plurality of air-evacuation channels, each of the pressure outlets fluidically connected through a pressure flow restrictor to a high-pressure reservoir, the pressure outlets providing pressurized air for generating pressure induced forces, maintaining an air-cushion between the object and the support surface, the pressure flow restrictor characteristically exhibiting fluidic return spring behavior; each of said at least one of a plurality of air-evacuation channels having an inlet and outlet, the inlet kept at an ambient pressure or lower, under vacuum condition, for locally discharging mass flow, thus obtaining uniform support and local nature response.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.