Imprint apparatus and imprint method including dual movable image pick-up device
US7531821B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 6, 2007 |
| Grant date | May 12, 2009 |
| Priority date | — |
| Expiry date | Nov 27, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06V20/62
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An imprint apparatus, comprising a first holder for holding a mold having an imprint pattern; a second holder for holding a workpiece to which the imprint pattern is transferred; a first illumination system for irradiating a mark for determining a position of the mold and a mark for determining a position of the workpiece with light; a first and second optical systems for imaging the marks for the mold and workpiece at a first and second observation points respectively; an imaging optical system; a first and second image pick-up devices for observing the marks for the mold and workpiece respectively; and at least one of a first drive mechanism for moving the first image pick-up device while following movement of the first observation point and a second drive mechanism for moving the second image pick-up device while following movement of the second observation point.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.