Oscillator for atomic force microscope and other applications
US7533561B2 · kind B2 · utility
6Cited by
29References
20Claims
0Family size
Inventors
Key dates
| Filing date | Aug 18, 2006 |
| Grant date | May 19, 2009 |
| Priority date | — |
| Expiry date | Dec 12, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device such as a sensor for use in an atomic force microscope. The device comprises a first oscillator, a second oscillator, a pair of first co-axial members interconnecting the first and second oscillators for torsionally suspending the first oscillator, a support structure, and a pair of second co-axial members whose axis is orthogonal to an axis of the first co-axial members and which interconnect the second oscillator and the support structure for torsionally suspending the second oscillator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.