Getter precursors for hermetically sealed packaging

US7534635B1 · kind B1 · utility

Assignee

• General Electric Company · US

Inventors

• Donald Franklin Foust · Scotia, US
• Linda Ann Boyd · Malta, US
• Anil Raj Duggal · Niskayuna, US
• Qinglan Huang · Niskayuna, US
• Larry Neil Lewis · Scotia, US

Key dates

• Filing date: Mar 24, 2008
• Grant date: May 19, 2009
• Expiry date: Mar 24, 2028

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/12044
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Hermetically sealed packages include a getter precursor disposed within an interior region of the package. The getter precursor includes a cation portion and a non-oxidizing anion portion, which is configured to thermally decompose to change an oxidation state of cation to zero. Also disclosed herein are processes for hermetically sealing a package by coating a solution of the getter precursor onto interior defining wall surface of the package.