Piezoelectric resonator structure and method for manufacturing a coupled resonator device
US7535324B2 · kind B2 · utility
32Cited by
4References
34Claims
0Family size
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Key dates
| Filing date | Jun 15, 2007 |
| Grant date | May 19, 2009 |
| Priority date | — |
| Expiry date | Oct 18, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A method for manufacturing a coupled resonator device includes forming a first part of a plurality of layers, trimming an exposed layer of the first part and forming a remaining part of the plurality of layers. The coupled resonator device includes a stack of the plurality of layers, the plurality of layers including a first piezo-layer with a first and a second electrode layer sandwiching the first piezo-layer, a second piezo-layer with a first and a second electrode layer sandwiching the second piezo-layer, the first and second piezo-layers being acoustically coupled to each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.