Integrated optical rotation sensor and method for sensing rotation rate
US7535576B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 15, 2006 |
| Grant date | May 19, 2009 |
| Priority date | — |
| Expiry date | Apr 17, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/727
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and apparatus are provided for a low cost optical gyro using thin film waveguides to direct light beams among the components of the gyro. The gyro includes a substrate having an insulator layer, a silicon waveguide formed on the insulator layer, and a resonator coupled to the silicon waveguide and configured to circulate a portion of a first light beam in a first counter-propagating direction and circulate a portion of a second light beam in a second counter-propagating direction. The first silicon waveguide propagates the first and second light beams therethrough. Each of the first and second light beams has a resonance frequency when circulating in the resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.