Magnetic recording head with shaped pole
US7535675B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 27, 2005 |
| Grant date | May 19, 2009 |
| Priority date | — |
| Expiry date | Dec 20, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49021
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Embodiments of the invention provide a thin film magnetic recording head that can reduce the round portion of the track restriction part of the main pole and has excellent track width accuracy, as well as its fabrication method. In one embodiment, the main pole is etched in the following three processes. (1) An ion beam is injected into the substrate at an angle of about 50°±20° while vibrating the substrate horizontally within a range of about ±(30° to 150°) in a reference direction in which the ion beam is oriented from the medium to the air bearing surface. (2) The ion beam is injected into the substrate at an angle of about 60°±20° while vibrating the substrate around a predetermined angle of about 90° to 135° from a direction in which the ion beam is oriented from the medium to the air bearing surface. (3) The ion beam is injected into the substrate at an angle of about 60°±20° while vibrating the substrate horizontally at a predetermined angle within about ±45° around a predetermined angle within about −90° to −135° from a direction in which the ion beam is oriented from the medium to the air bearing surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.