Diaphragm vacuum measuring cell and method for the production of such measuring cell

US7536915B2 · kind B2 · utility

Assignee

• INFICON AG · LI

Inventors

• Carsten Strietzel · Feldkirch, AT
• Per Bjorkman · Wittenberge, DE
• Walter Berner · Stuttgart, DE

Key dates

• Filing date: Nov 6, 2007
• Grant date: May 26, 2009
• Expiry date: Nov 6, 2027

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L19/0627
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Introduced is a method for the production of a diaphragm vacuum measuring cell, wherein on the one side of the diaphragm (2) at a spacing a first housing plate (1) is disposed sealing in the margin region with a joining means (3), and that on the other side of the diaphragm (2) at a spacing a second housing plate (4) is disposed sealing in the margin region with a joining means (3), and that the second housing plate (4) has an opening at which a connection means (5) is disposed sealing with joining means (3) for the connection of the measuring cell (8) with the medium to be measured, wherein the diaphragm (2) and the two housing plates (1, 4) are comprised of a metal oxide. Using an ALD method, the measuring cell is coated in a vacuum chamber (64), in particular through the opening of the measuring cell, such that the inner wall of the measuring vacuum chamber (9) and the opening with the connection means (5) is covered with a protective layer (13) such that at least the joining means (3) for the diaphragm (2) is protectively covered against corrosion.