Method of making low-E coating using ceramic zinc inclusive target, and target used in same
US7537677B2 · kind B2 · utility
18Cited by
10References
15Claims
0Family size
Assignee
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Key dates
| Filing date | Jan 19, 2005 |
| Grant date | May 26, 2009 |
| Priority date | — |
| Expiry date | May 20, 2025 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2218/154
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A ceramic target is used in sputter-depositing a contact layer adjacent an infrared (IR) reflecting layer in certain example embodiments. For example, a ZnOx ceramic target may be used in sputter-depositing a zinc oxide inclusive layer over and/or under a silver based IR reflecting layer in certain embodiments. In certain example embodiments, the ceramic target may be doped with a non-metal such as F and/or B.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.