Method of manufacturing a structure having a projection
US7538042B2 · kind B2 · utility
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15References
4Claims
0Family size
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Key dates
| Filing date | Mar 2, 2005 |
| Grant date | May 26, 2009 |
| Priority date | — |
| Expiry date | Feb 3, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0017
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method of manufacturing a structure is provided. This method include a steps of preparing a first substrate having a projection, forming a first layer on the projection, transferring the first layer to a second substrate, and removing at least apart of the second substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.