Method of fabricating sample membranes for transmission electron microscopy analysis
US7538322B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 3, 2006 |
| Grant date | May 26, 2009 |
| Priority date | — |
| Expiry date | Jul 11, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N1/2813
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of fabricating sample lamella for transmission electron microscopy (TEM) analysis is provided. A waiting-examination sample having an analysis target on the top surface of that is offered, and at least a mark around the analysis target is defined. A covering layer is covered on the top surface of waiting-examination sample. A holder is attached on the covering layer. A backside polishing process is performed to remove a portion of the waiting-examination sample until the mark is visible under the optical microscopy from the bottom surface of waiting-examination sample. An in-situ lift-out step is performed to pick up a thin membrane containing the analysis target and serve as the sample for TEM analysis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.