Test handler and operation method thereof
US7538542B2 · kind B2 · utility
4Cited by
3References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 15, 2006 |
| Grant date | May 26, 2009 |
| Priority date | — |
| Expiry date | Jun 20, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2867
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A test handler is disclosed. A posture changing unit for changing a posture of a test tray on which semiconductor devices have been loaded changes the posture of the test tray in a soak chamber. While the posture of the test tray is changed, the devices can be pre-heated/pre-cooled, thereby reducing the soak chamber length and the pre-heating/pre-cooling time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.