High performance miniature RF sensor for use in microelectronics plasma processing tools
US7538562B2 · kind B2 · utility
4Cited by
5References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 19, 2007 |
| Grant date | May 26, 2009 |
| Priority date | — |
| Expiry date | Mar 19, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32935
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A high-performance miniature RF sensor that maintains gain, directivity, and isolation in a miniature package. The miniature RF sensor includes stacked current and voltage pickups disposed in a PCB construction, the sensor further including quarter wave transforming filter, triaxial shielding, and skin-effect filtering.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.