MEMS mirror with parallel springs and arched support for beams
US7538928B1 · kind B1 · utility
1Cited by
2References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 2, 2007 |
| Grant date | May 26, 2009 |
| Priority date | — |
| Expiry date | Apr 25, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-electro-mechanical system (MEMS) mirror device includes (1) a mirror, (2) spring elements coupled to the mirror, (3) a beam coupled to the group of spring elements, (4) a spring coupled to the beam, and (5) a stationary pad coupled to the spring. The spring elements includes (1) a straight section having a first end coupled to the beam structure, and (2) spring sections having (a) first ends coupled to a second end of the straight section and (b) second ends coupled to the mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.