Dielectric film production process and capacitor
US7539005B2 · kind B2 · utility
3Cited by
4References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 26, 2006 |
| Grant date | May 26, 2009 |
| Priority date | — |
| Expiry date | May 22, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K2201/0355
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A capacitor provided with a dielectric film, and a first electrode and second electrode formed sandwiching it and facing each other, wherein the dielectric film has a density exceeding 72% of the theoretical density calculated based on the lattice constant, and either or both of said first electrode and said second electrode contain at least one metal selected from the group consisting of Cu, Ni, Al, stainless steel and a nickel-based alloy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.