Method and apparatus facilitating mechanical beam steering for optical integrated circuits
US7539364B2 · kind B2 · utility
7Cited by
20References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 1, 2005 |
| Grant date | May 26, 2009 |
| Priority date | — |
| Expiry date | Oct 31, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/12
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Actuators facilitating mechanical beam steering for optical integrated circuits are disclosed. The mechanical beam steering can mitigate thermal sensitivity of optical circuits, for example, arrayed waveguides. Also disclosed are methods for fabricating optical integrated circuits employing actuators.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.