Membrane nanopumps based on porous alumina thin films, membranes therefor and a method of fabricating such membranes

US7540717B2 · kind B2 · utility

Assignee

• The Hong Kong University of Science and Technology

Inventors

• Ping Sheng · Hong Kong, CN
• Ning Wang · Beijing, CN
• Jianying Miao · Hong Kong, CN
• Zhiyu Yang · Dublin, US
• Shihe Yang · Kowloon, CN
• Xinyi Zhang · Jinan, CN

Key dates

• Filing date: Jun 3, 2005
• Grant date: Jun 2, 2009
• Expiry date: Apr 29, 2026

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F04B17/00
• WIPO field: Engines, pumps, turbines
• WIPO sector: Mechanical engineering

Abstract

A technique has been developed to fabricate micro- or nanopumps based on porous alumina thin films. The main body of the nanopump consists of a porous alumina thin film (containing nano-sized channels of about 40-300 nm in diameter) with conductive surfaces (e.g. Au coating layers) on both sides of the film. Through the fabrication of nanochannels in (the alumina films) and the subsequent annealing and surface activation processes, high-efficiency micro- or nanopumps can be made. The nanofluidic flow through the nanochannels of the alumina thin films is driven by an electric field with no moving parts. The flow rate (up to 50 millilitres/(min·cm2)) of water through the alumina thin film can be continuously tuned through the intensity of the electric field, i.e., the DC electric potential applied across the nanochannels.