Protective layer for a body, and process and arrangement for producing protective layers

US7541102B2 · kind B2 · utility

Assignee

• Schott AG · DE

Inventors

• Lutz Klippe · Wiesbaden, DE
• Cora Krause · Burrweiler, DE
• Jürgen Dzick · Göttingen, DE

Key dates

• Filing date: Sep 8, 2004
• Grant date: Jun 2, 2009
• Expiry date: Jan 12, 2025

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/12771
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A protective layer having at least one hard-material layer is provided. The hard-material layer is formed from one or more of the following materials metal oxide, metal nitride, metal carbide, metal oxynitride, metal carbonitride, and metal oxycarbonitride. The hard-material layer has laterally closely cohesive, crystalline columns which grow perpendicular to the surface of the body. In some embodiments, the crystalline columns have a lateral dimension which is on average less than 1 μm, preferably less than 200 nm, and which predominantly has crystal orientations which, in the case of columnar growth, have little tendency to widen out, the surface roughness of the hard-material layer having an Ra value of less than 50 nm, preferably less than 20 nm.