Method for production of a device for thermal detection of radiation comprising an active microbolometer and a passive microbolometer
US7541582B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 4, 2005 |
| Grant date | Jun 2, 2009 |
| Priority date | — |
| Expiry date | Dec 26, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2005/066
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a passive microbolometer (12), comprising a reflective screen (17) and a suspended membrane with the function of radiation absorber, thermometer and electrical connection. The membrane is supported by at least two anchor elements (15) fixed to a support substrate (16). The reflective screen (17) may be embodied by at least one layer (18) of metallic material with a thickness of the order of 500 Å to 2000 Å. The screen (17) is arranged beneath the membrane in electrical contact with the membrane absorber element (13) such as to reduce the area resistance of the unit made up of the screen (17) and the absorbing element (13) and to avoid the absorption of radiation by the latter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.