Carbon thin line probe
US7543482B2 · kind B2 · utility
4Cited by
1References
1Claims
0Family size
Assignee
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Key dates
| Filing date | Feb 27, 2007 |
| Grant date | Jun 9, 2009 |
| Priority date | — |
| Expiry date | Feb 27, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/879
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A carbon thin line probe having a carbon thin line selectively formed at a projection-like terminal end portion thereof by means of an irradiation of high-energy beam, the carbon thin line internally containing a metal. Thereby achieved is a carbon thin line probe suitable for example for the probe of SPM cantilever, which has a high aspect ratio and high durability and reliability, capability of batch processing based on a simple manufacturing method, and to which magnetic characteristic can be imparted.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.