Method for manufacturing a capacitor electrode structure

US7544562B2 · kind B2 · utility

Assignee

• Qimonda AG · DE

Inventors

• Peter Moll · Dresden, DE
• Odo Wunnicke · Dresden, DE

Key dates

• Filing date: Jul 19, 2006
• Grant date: Jun 9, 2009
• Expiry date: Sep 14, 2027

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D89/10
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

A method for manufacturing a capacitor electrode structure, according to which the following steps are executed: A substrate is provided, which comprises contact pads arranged in lines and rows on a surface of the substrate. The lines are non-parallel to the rows. A first mold is applied on the substrate. At least one first trench is formed into the first mold above the contact pads. The first trench spans over at least two contact pads arranged in one row. A first dielectric layer is applied on side walls of the at least one first trench for forming first supporting walls. A second mold is applied on the substrate. At least one second trench is formed into the second mold above the contact pads. The second trench spans over at least two contact pads arranged in one line. A second dielectric layer is applied on side walls of the at least one second trench for forming second supporting walls. And a conductive layer is applied on the first and second supporting walls for forming a first electrode of the capacitor structure.