Patent · US Active

MEMS display

US7545554B2 · kind B2 · utility

13Cited by
30References
49Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 14, 2008
Grant dateJun 9, 2009
Priority date
Expiry dateApr 14, 2028

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG09G2310/0297
  • WIPO fieldAudio-visual technology
  • WIPO sectorElectrical engineering

Abstract

A display comprising: a plurality of MEMS elements arranged in rows, wherein the MEMS elements of each of the rows are further arranged in subrows and wherein the subrows of each row are electrically connected; and wherein the physical property of at least one MEMS element in at least one subrow is different from the physical property of at least one MEMS element in other subrows. The physical property can be a spring constant associated with a movable mirror, a film thickness, an electrode width, a damping force caused by air between a movable mirror and a fixed mirror, a mass of a movable mirror, a material or geometry of the respective MEMS element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.