MEMS display
US7545554B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 14, 2008 |
| Grant date | Jun 9, 2009 |
| Priority date | — |
| Expiry date | Apr 14, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2310/0297
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A display comprising: a plurality of MEMS elements arranged in rows, wherein the MEMS elements of each of the rows are further arranged in subrows and wherein the subrows of each row are electrically connected; and wherein the physical property of at least one MEMS element in at least one subrow is different from the physical property of at least one MEMS element in other subrows. The physical property can be a spring constant associated with a movable mirror, a film thickness, an electrode width, a damping force caused by air between a movable mirror and a fixed mirror, a mass of a movable mirror, a material or geometry of the respective MEMS element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.