Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods
US7545622B2 · kind B2 · utility
58Cited by
30References
11Claims
0Family size
Assignee
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Key dates
| Filing date | Mar 8, 2007 |
| Grant date | Jun 9, 2009 |
| Priority date | — |
| Expiry date | Mar 8, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G5/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods are provided. A MEMS variable capacitor can include first and second feed lines extending substantially parallel to one another. Further, MEMS variable capacitors can include first and second capacitive plates being spaced apart from the first and second feed lines. The first and second capacitive plates can be separately movable with respect to at least one of the first and second feed lines for varying the capacitance between the first and second feed lines over a predetermined capacitance range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.