Ultra-high Q micro-resonator and method of fabrication
US7545843B2 · kind B2 · utility
21Cited by
15References
57Claims
0Family size
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Key dates
| Filing date | Oct 2, 2003 |
| Grant date | Jun 9, 2009 |
| Priority date | — |
| Expiry date | Nov 15, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/1075
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-cavity resonator including a micro-cavity capable of high and ultra-high Q values and a silicon substrate. Portions of the silicon substrate located below a periphery of the micro-cavity are removed to form a pillar, which supports the micro-cavity. Optical energy travels along an inner surface of the micro-cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.