Systems and methods for improved control of micro-electrical-mechanical system (MEMS) electrostatic actuator
US7548011B2 · kind B2 · utility
1Cited by
13References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 18, 2006 |
| Grant date | Jun 16, 2009 |
| Priority date | — |
| Expiry date | Jun 4, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K2201/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Methods and apparatuses for sensing and adjusting lateral motion in a comb drive actuated MEMS device are provided. If lateral motion is sensed by a lateral motion sensor coupled to the comb drive actuated MEMS device, and the lateral motion is greater than a reference value, a feedback controller adjusts the lateral motion by providing a drive signal to a comb drive electrode of a comb drive actuator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.